A bulk silicon micromachined structure for gas microdischarge-based detection of beta-particles
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چکیده
منابع مشابه
A bulk silicon micromachined structure for gas microdischarge-based detection of beta-particles
This paper describes two Si micromachined structures for sensing beta-particles. The basic device (the micro-detector) includes a square silicon cathode surrounded by a concentric anode, and is formed by stacks of glass and Si wafers. Incident beta-particles ionize the gas encapsulated between the electrodes, resulting in an avalanche current pulse or ‘count’. It is shown experimentally that de...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2008
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/18/9/095007